This study presents a newly engineered nonlinear stiffness-softening mechanism that enables micro-electro-mechanical systems (MEMS) accelerometers to operate with dramatically reduced bias force and ...
PROF. BARUS' work is divided into twelve chapters, and occupies an intermediate position between the usual textbook dealing with routine work and the ordinary type of original research which attacks ...
Sensors for the measurement of displacement based on a number of different physical principles are available for a wide range of applications. This article considers systems capable of resolutions of ...
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It is not an easy task to measure to the nanometer scale—achieving it requires careful engineering and a stable sensor. The sensors employed for stage position feedback within semiconductor ...
Scientists needing to make sensitive displacement measurements will benefit from a simple way to increase the resolution of an interferometer. Researchers in France have discovered a clever way to ...
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